Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6290631 | Method for restoring an alignment mark after planarization of a dielectric layer | Chih-Hsun Chu | 2001-09-18 |
| 6180537 | Method of fabricating dielectric layer in alignment marker area | — | 2001-01-30 |
| 6015744 | Method of manufacturing a shallow trench isolation alignment mark | — | 2000-01-18 |