| 12334436 |
Metal interconnect structure having serpent metal line |
Shih-Che Huang, Ching-Chih Chang, Chih-Sheng Chang |
2025-06-17 |
| 12057346 |
Semiconductor device including metal interconnections having sidewall spacers thereon, and method for fabricating the same |
Ching-Chih Chang, Chih-Sheng Chang |
2024-08-06 |
| 12007435 |
Method of copper hillock detecting |
Ching-Chih Chang, Yi-Hsiu Chen, Chih-Sheng Chang |
2024-06-11 |
| 11791203 |
Semiconductor device including metal interconnections having sidewall spacers thereon, and method for fabricating the same |
Ching-Chih Chang, Chih-Sheng Chang |
2023-10-17 |
| 11515159 |
Forming contact holes using litho-etch-litho-etch approach |
Ching-Chih Chang, Chih-Sheng Chang |
2022-11-29 |
| 11456207 |
Semiconductor device including metal interconnections having sidewall spacers thereon, and method for fabricating the same |
Ching-Chih Chang, Chih-Sheng Chang |
2022-09-27 |
| 10916427 |
Forming contact holes using litho-etch-litho-etch approach |
Ching-Chih Chang, Chih-Sheng Chang |
2021-02-09 |
| 10204826 |
Method for removing damaged layer embedded in a dielectric layer |
Min-Shiang Hsu, Chih-Sheng Chang |
2019-02-12 |