Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6210754 | Method of adjusting for parallel alignment between a shower head and a heater platform in a chamber used in integrated circuit fabrication | Tsung-Lin Lu, Ping-Chung Chung | 2001-04-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6210754 | Method of adjusting for parallel alignment between a shower head and a heater platform in a chamber used in integrated circuit fabrication | Tsung-Lin Lu, Ping-Chung Chung | 2001-04-03 |