TL

Tso-Lung Lai

UM United Microelectronics: 1 patents #2,686 of 4,560Top 60%
Overall (All Time): #3,577,328 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6210754 Method of adjusting for parallel alignment between a shower head and a heater platform in a chamber used in integrated circuit fabrication Tsung-Lin Lu, Ping-Chung Chung 2001-04-03