Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9149392 | Casting apparatus | BING-TANG ZHONG, Yueh-Lin Chung | 2015-10-06 |
| 7572320 | Method and apparatus for removing high concentration ozone from a waste gas steam | Shaw-Yi Yan, Sheng-Jen Yu, Shou-Nan Li, Chang-Fu Hsu | 2009-08-11 |
| 6569253 | Method of cleaning a chamber of a CVD machine and elements within | Wei-Hsu Wang, Tsan-Chi Chu, Cheng Yao, Wei-Hao Lee | 2003-05-27 |
| 6315834 | Method for removing extraneous matter by using fluorine-containing solution | Tsung-Lin Lu, Hunter Chung, Chin-Hsien Chen, Weng-Yi Chen, Jack Yao +1 more | 2001-11-13 |
| 6303939 | Wafer mapping apparatus | Tsung-Lin Lu | 2001-10-16 |
| 6217640 | Exhaust gas treatment apparatus | Tsung-Lin Lu, Jing-Yi Huang, Frank H. Y. Chung | 2001-04-17 |
| 6218320 | Method for improving the uniformity of wafer-to-wafer film thickness | Tsung-Lin Lu, Yun-Sueng Liou, Yung-Chun Wen, Tsang-Jung Lin | 2001-04-17 |
| 6210754 | Method of adjusting for parallel alignment between a shower head and a heater platform in a chamber used in integrated circuit fabrication | Tsung-Lin Lu, Tso-Lung Lai | 2001-04-03 |
| 6011402 | Electro-optic apparatus and method for measuring electric-field vector | Wen-Kai Kuo, Sheng-Lung Huang, Liang Chang, Hsiao-Yu Chou, Wen-Fa Chen | 2000-01-04 |