Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8282842 | Cleaning method following opening etch | Chieh-Ju Wang, Yu-Tsung Lai, Jiunn-Hsiung Liao | 2012-10-09 |
| 8137472 | Semiconductor process | Chang-Hsiao Lee, Shih-Fang Tzou, Ming-Da Hsieh, Yu-Tsung Lai, Jiunn-Hsiung Liao | 2012-03-20 |
| 8101092 | Method for controlling ADI-AEI CD difference ratio of openings having different sizes | Chih-Wen Feng, Pei-Yu Chou, Chun-Ting Yeh, Jiunn-Hsiung Liao, Feng-Yi Chang +1 more | 2012-01-24 |
| 8080877 | Damascene interconnection structure and dual damascene process thereof | Chun-Jen Huang, Yu-Tsung Lai, Jiunn-Hsiung Liao | 2011-12-20 |
| 7977244 | Semiconductor manufacturing process | Yu-Tsung Lai, Chun-Jen Huang, Jiunn-Hsiung Liao | 2011-07-12 |
| 7767578 | Damascene interconnection structure and dual damascene process thereof | Chun-Jen Huang, Yu-Tsung Lai, Jiunn-Hsiung Liao | 2010-08-03 |