Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5883014 | Method for treating via sidewalls with hydrogen plasma | Shiaw-Rong Chen, Jenn-Tarng Lin | 1999-03-16 |
| 5876508 | Method of cleaning slurry remnants after the completion of a chemical-mechanical polish process | Kun-Lin Wu, Chien-Hsien Lai, Jenn-Tarng Lin | 1999-03-02 |