Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5910452 | Method for reducing antenna effect during plasma etching procedure for semiconductor device fabrication | Tzong-Kuei Kang, Huang-Chung Cheng, Chun-Hung Peng | 1999-06-08 |