Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062487 | Wafer supporting device of a sputtering apparatus | Li-Chun Liang, Yu-Jen Huang, Been-long Chen, Sheng-Yih Ting | 2011-11-22 |
| 7223157 | Chemical-mechanical polishing apparatus and method of conditioning polishing pad | Sheng-Yu Chen, Te-Sung Hung, Chung-Jun Cheng, Po-Yuan Cheng | 2007-05-29 |
| 6913520 | All-in-one polishing process for a semiconductor wafer | Mu-Liang Liao, Te-Sung Hung, Yung-Chieh Kuo | 2005-07-05 |