Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7413848 | Method of removing photoresist and photoresist rework method | Lien-Sheng Chung, Hsin-Hsu Lin | 2008-08-19 |
| 6074950 | Alignment strategy for asymmetrical alignment marks | — | 2000-06-13 |
| 6049383 | Aligner detector including an electrooptic modulator for each diffraction order | — | 2000-04-11 |
| 5950093 | Method for aligning shallow trench isolation | — | 1999-09-07 |