Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217969 | Silicon dry etching method | Kenta Doi, Toshiyuki Nakamura, Yasuhiro Morikawa | 2025-02-04 |
| 10079133 | Plasma processing device | Takahide Murayama, Yasuhiro Morikawa | 2018-09-18 |