Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217969 | Silicon dry etching method | Toshiyuki Sakuishi, Toshiyuki Nakamura, Yasuhiro Morikawa | 2025-02-04 |
| 12205795 | Plasma processing device | Taichi Suzuki, Yasuhiro Morikawa, Toshiyuki Nakamura | 2025-01-21 |
| 12020942 | Etching method | Taichi Suzuki, Yasuhiro Morikawa, Toshiyuki Nakamura | 2024-06-25 |
| 11665809 | High-frequency power circuit, plasma treatment apparatus, and plasma treatment method | Toshiyuki Nakamura | 2023-05-30 |