| 11309454 |
Deep ultraviolet LED and method for producing the same |
Yukio Kashima, Eriko Matsuura, Mitsunori Kokubo, Takaharu Tashiro, Hideki Hirayama +9 more |
2022-04-19 |
| 10991591 |
Reactive ion etching apparatus |
Yamato Osada |
2021-04-27 |
| 10950751 |
Deep ultraviolet LED and method for manufacturing the same |
Yukio Kashima, Eriko Matsuura, Mitsunori Kokubo, Takaharu Tashiro, Hideki Hirayama +2 more |
2021-03-16 |
| 10680134 |
Deep ultraviolet LED and method for manufacturing the same |
Yukio Kashima, Eriko Matsuura, Mitsunori Kokubo, Takaharu Tashiro, Hideki Hirayama +2 more |
2020-06-09 |
| 10056526 |
Deep ultraviolet LED and method for manufacturing the same |
Yukio Kashima, Eriko Matsuura, Mitsunori Kokubo, Takaharu Tashiro, Hideki Hirayama +2 more |
2018-08-21 |
| 9929317 |
Deep ultraviolet LED and method for manufacturing the same |
Yukio Kashima, Eriko Matsuura, Mitsunori Kokubo, Takaharu Tashiro, Takafumi Ookawa +5 more |
2018-03-27 |
| 9929311 |
Semiconductor light emitting element and method for producing the same |
Yukio Kashima, Eriko Matsuura, Mitsunori Kokubo, Takaharu Tashiro, Takafumi Ookawa +5 more |
2018-03-27 |
| 9806229 |
Deep ultraviolet LED and method for manufacturing the same |
Yukio Kashima, Eriko Matsuura, Mitsunori Kokubo, Takaharu Tashiro, Takafumi Ookawa +3 more |
2017-10-31 |
| 9349918 |
Light emitting element and method for manufacturing same |
Yukio Kashima, Eriko Matsuura, Hiromi Nishihara, Takaharu Tashiro, Takafumi Ookawa +5 more |
2016-05-24 |
| 8921135 |
Method for manufacturing device |
Yamato Osada, Yukio Kashima, Hiromi Nishihara, Takaharu Tashiro, Takafumi Ookawa |
2014-12-30 |
| 8582274 |
Tray for transporting wafers and method for fixing wafers onto the tray |
Kazuhiro Watanabe, Ryuji Hashimoto |
2013-11-12 |
