Deep ultraviolet LED and method for manufacturing the same

Assignee

• Marubun
• Toshiba Kikai
• Riken
• Ulvac
• Tokyo Ohka Kogyo Co.

Inventors

• Yukio Kashima (9 patents)
• Eriko Matsuura (8 patents)
• Mitsunori Kokubo (31 patents)
• Takaharu Tashiro (15 patents)
• Hideki Hirayama (69 patents)
• Ryuichiro Kamimura (11 patents)
• Yamato Osada (10 patents)
• Toshiro Morita (13 patents)

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