Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9562926 | Micro-electro-mechanical system (MEMS) device including an internal anchor area | Chiung-Wen Lin, Chiung C. Lo | 2017-02-07 |
| 9362257 | Mirco-electro-mechanical system module and manufacturing method thereof | Chiung C. Lo, Ning Wang, Chiung-Wen Lin | 2016-06-07 |
| 9206032 | Micro-electro-mechanical system (MEMS) chip | Chiung C. Lo | 2015-12-08 |
| 7533564 | Micro sample heating apparatus and method of making the same | Chin-Chang Pan | 2009-05-19 |
| 7531457 | Method of fabricating suspended structure | Chen-Hsiung Yang | 2009-05-12 |
| 7465601 | Method of forming suspended structure | Chen-Hsiung Yang | 2008-12-16 |
| 7432208 | Method of manufacturing suspension structure | — | 2008-10-07 |
| 7395706 | Micro sample heating apparatus and method of making the same | Chin-Chang Pan | 2008-07-08 |
| 7393784 | Method of manufacturing suspension structure and chamber | — | 2008-07-01 |