Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12205804 | Silicon sputtering target with special surface treatment and good particle performance and methods of making the same | Yongwen Yuan, Eugene Y. Ivanov, Yang Liu, Phil Frausto | 2025-01-21 |
| 9566618 | Silicon sputtering target with special surface treatment and good particle performance and methods of making the same | Yongwen Yuan, Eugene Y. Ivanov, Yang Liu, Phil Frausto | 2017-02-14 |
| 9546418 | Diffusion-bonded sputter target assembly and method of manufacturing | David B. Smathers, Eugene Y. Ivanov, Erich Theado, Robert S. Bailey, Jeff Hart | 2017-01-17 |
| 9150956 | Monolithic aluminum alloy target and method of manufacturing | David B. Smathers, Robert S. Bailey | 2015-10-06 |
| 8551267 | Monolithic aluminum alloy target and method of manufacturing | David B. Smathers, Robert S. Bailey | 2013-10-08 |
| 6955798 | Method for manufacturing aluminum oxynitride (AlON) powder and other nitrogen-containing powders | — | 2005-10-18 |