Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12205804 | Silicon sputtering target with special surface treatment and good particle performance and methods of making the same | Yongwen Yuan, Eugene Y. Ivanov, Yang Liu, Weifang Miao | 2025-01-21 |
| 9566618 | Silicon sputtering target with special surface treatment and good particle performance and methods of making the same | Yongwen Yuan, Eugene Y. Ivanov, Yang Liu, Weifang Miao | 2017-02-14 |