Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040228 | Semiconductor device and manufacturing method thereof | Satoshi Wakatsuki, Naomi Fukumaki, Misuzu SATO, Masakatsu Takeuchi | 2024-07-16 |
| 10854488 | Wafer conveying apparatus and wafer conveying method | Fumiki Aiso, Ryota Fujitsuka, Kensei Takahashi, Takayuki Matsui | 2020-12-01 |
| 10669621 | Vaporization system | Fumiki Aiso, Hajime Nagano, Kensei Takahashi | 2020-06-02 |
| 10403531 | Semiconductor manufacturing apparatus with supporting columns and tables | Fumiki Aiso, Ryota Fujitsuka, Kensei Takahashi, Takayuki Matsui | 2019-09-03 |
| 8304021 | Vapor phase deposition apparatus, method for depositing thin film and method for manufacturing semiconductor device | Tomoe Yamamoto | 2012-11-06 |
| 7608502 | Method for manufacturing semiconductor device | Naomi Fukumaki, Yoshitake Kato, Tomoe Yamamoto | 2009-10-27 |