Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6025596 | Method for measuring epitaxial film thickness of multilayer epitaxial wafer | Hiroshi Shirai, Kenji Akai, Toshio Abe, Katsuyuki Iwata | 2000-02-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6025596 | Method for measuring epitaxial film thickness of multilayer epitaxial wafer | Hiroshi Shirai, Kenji Akai, Toshio Abe, Katsuyuki Iwata | 2000-02-15 |