Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8734575 | Airflow controlling device and method | Masato Tanaka, Mayumi Miura, Shuji Sawada, Yasuko Horiguchi | 2014-05-27 |
| 6025596 | Method for measuring epitaxial film thickness of multilayer epitaxial wafer | Hiroshi Shirai, Toshio Abe, Chikara Tojima, Katsuyuki Iwata | 2000-02-15 |