Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913526 | Polishing machine for polishing periphery of sheet | — | 2005-07-05 |
| 6752701 | Planarization apparatus with grinding and etching devices and holding device for moving workpiece between said devices | — | 2004-06-22 |
| 6042459 | Surface machining method and apparatus | — | 2000-03-28 |
| 6030278 | Surface machining method and apparatus | — | 2000-02-29 |
| 5816895 | Surface grinding method and apparatus | — | 1998-10-06 |
| 5791976 | Surface machining method and apparatus | — | 1998-08-11 |
| 5524604 | Method and apparatus for slicing semiconductor wafers | — | 1996-06-11 |
| 5295331 | Method of chamfering semiconductor wafer | Yoshio Kamoshita, Shinji Shibaoka, Katsuhiro Tago | 1994-03-22 |
| 5000156 | Method and device for dressing an inner peripheral blade in a slicing machine | Masato Inamura | 1991-03-19 |
| 4903681 | Method and apparatus for cutting a cylindrical material | Shuichi Tsukada | 1990-02-27 |
| 4894956 | Apparatus and method for slicing a wafer | Susumu Sawafuji | 1990-01-23 |
| 4852304 | Apparatus and method for slicing a wafer | Susumu Sawafuji | 1989-08-01 |
| 4838238 | Internal peripheral edge type blade holding device | Susumu Sawafuji, Tomio Tomita | 1989-06-13 |