Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6616770 | Cleaning method of containers and apparatus thereof | Takanori Musha, Takashi Takeda | 2003-09-09 |
| 6347637 | Cleaning method of containers and apparatus thereof | Takanori Musha, Takashi Takeda | 2002-02-19 |
| 4797348 | Method of forming a positive resist pattern in photoresist of o-naphthoquinone diazide and bisazide with UV imaging exposure and far UV overall exposure | Yoichi Nakamura, Takashi Komine, Akira Yokota, Hisashi Nakane | 1989-01-10 |
| 4610953 | Aqueous developer solution for positive type photoresists with tetramethyl ammonium hydroxide and trimethyl hydroxyethyl ammonium hydroxide | Koichiro Hashimoto, Hisashi Nakane, Akira Yokota | 1986-09-09 |