Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7951523 | Material for forming resist protective film and method for forming resist pattern using same | Kotaro Endo, Tomovuki Hiranoa | 2011-05-31 |
| 7879529 | Material for formation of resist protection film and method of forming resist pattern therewith | Kotaro Endo, Masaaki Yoshida | 2011-02-01 |
| 7846637 | Material for forming resist protective film for use in liquid immersion lithography process and method for forming resist pattern using the protective film | Kazumasa Wakiya, Kotaro Endo, Masaaki Yoshida | 2010-12-07 |