YS

Yosuke Sakao

TL Tokyo Electron Limited: 2 patents #2,602 of 5,567Top 50%
Overall (All Time): #2,091,920 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
8298957 Plasma etchimg method and plasma etching apparatus Kensuke Kamiutanai, Akitaka Shimizu 2012-10-30
8198197 Plasma etching method Hiroyuki Takahashi 2012-06-12