Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6758941 | Plasma processing unit, window member for plasma processing unit and electrode plate for plasma processing unit | Daisuke Hayashi | 2004-07-06 |
| 6448094 | Method of detecting etching depth | Yohei Yamazawa | 2002-09-10 |