TA

Takashi Ajishi

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,899,175 of 4,157,543Top 70%
1
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Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10022758 Substrate processing apparatus and method for detecting clogging of exhaust pipe in substrate processing apparatus Tomonori Okumura, Keisuke Tsugao 2018-07-17