Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12377384 | Substrate processing apparatus and control method of substrate processing apparatus | Tomonori Okumura | 2025-08-05 |
| 10128132 | Substrate liquid processing apparatus | Junya Minamida | 2018-11-13 |
| 10022758 | Substrate processing apparatus and method for detecting clogging of exhaust pipe in substrate processing apparatus | Tomonori Okumura, Takashi Ajishi | 2018-07-17 |
| 9842747 | Substrate liquid processing apparatus, exhaust switching unit and substrate liquid processing method | Junya Minamida | 2017-12-12 |