TO

Takahiko Otsu

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,603,305 of 4,157,543Top 65%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11742226 Substrate liquid processing apparatus Kazuya Koyama, Takao Inada 2023-08-29