Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6207006 | Vacuum processing apparatus | — | 2001-03-27 |
| D414503 | Machine for forming a semiconductor wafer film | — | 1999-09-28 |
| 5132545 | Ion implantation apparatus | Kazuhiro Shono, Shigeo Sasaki, Masao Naitou, Tetsuya Nakanishi, Naomitsu Fujishita +2 more | 1992-07-21 |