Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5387843 | Ion source having plasma chamber, an electron source, and a plasma power supply | Takahisa Nagayama, Kazuhiko Noguchi, Hidenobu Murakami | 1995-02-07 |
| 5329129 | Electron shower apparatus including filament current control | Kazuhiro Shono, Kazuhiko Noguchi, Takahisa Nagayama, Shigeo Sasaki | 1994-07-12 |
| 5132545 | Ion implantation apparatus | Kazuhiro Shono, Shigeo Sasaki, Susumu Katoh, Masao Naitou, Tetsuya Nakanishi +2 more | 1992-07-21 |