Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6442446 | Control apparatus | Tsuyoshi Nakamura | 2002-08-27 |
| 6233492 | Process control system and method for transferring process data therefor | Tsuyoshi Nakamura | 2001-05-15 |
| 6122556 | Operating system for fabrication apparatus | Iwao Kumasaka, Hiroshi Shimatani, Toshihiro Takashima | 2000-09-19 |