Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6122556 | Operating system for fabrication apparatus | Satoshi Tochiori, Hiroshi Shimatani, Toshihiro Takashima | 2000-09-19 |
| 6092980 | Substrate treatment equipment and method with testing feature | Koji Kubo, Makoto Suzuki, Yuji Tsunoda | 2000-07-25 |
| 5942012 | Heat treatment apparatus | Yuichi Higuchi | 1999-08-24 |
| 5822498 | Teaching method for loading arm for objects to be processed | Kazuhiko Usui | 1998-10-13 |
| 5770895 | Operation control device and method for a plurality of electric power consuming systems | — | 1998-06-23 |