Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705333 | Structures including multiple carbon layers and methods of forming and using same | Yoshio Susa, Yoshiyuki Kikuchi | 2023-07-18 |
| 10074550 | Plasma stability determination method and plasma processing apparatus | Naoto Watanabe, Koichiro Nakamura | 2018-09-11 |
| 9659752 | Method for presetting tuner of plasma processing apparatus and plasma processing apparatus | — | 2017-05-23 |