MA

Miki Aruga

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #3,313,778 of 4,157,543Top 80%
1
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Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7858509 High-dielectric film substrate processing method Kazuyoshi Yamazaki, Shintaro Aoyama, Kouji Shimomura 2010-12-28