Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11993848 | Gas nozzle, substrate processing apparatus, and substrate processing method | Satoru Ogawa | 2024-05-28 |
| 11885024 | Gas introduction structure and processing apparatus | Hiroki IRIUDA, Reita IGARASHI | 2024-01-30 |
| 11859285 | Processing apparatus and processing method | Hiroki IRIUDA | 2024-01-02 |
| 11047044 | Film forming apparatus and film forming method | Yoshihiro TAKEZAWA, Shigeru Nakajima | 2021-06-29 |
| 10753497 | Shutoff-opening device | Keisuke Ishibashi, Tsuyoshi Tanikawa, Michio Yamaji, Takashi Funakoshi, Hidenori Kiso +2 more | 2020-08-25 |