Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131889 | Plasma generating apparatus, plasma processing apparatus, and plasma processing method | Takeshi Kobayashi, Takeshi Ando, Yuki Tanaka | 2024-10-29 |
| 11694890 | Substrate processing method and substrate processing apparatus | Keiko Hosoe, Yamato Tonegawa | 2023-07-04 |