Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9441791 | Gas supply unit, substrate processing apparatus and supply gas setting method | Keiki Ito, Masahide Itoh | 2016-09-13 |
| 8906193 | Gas supply unit, substrate processing apparatus and supply gas setting method | Keiki Ito, Masahide Itoh | 2014-12-09 |
| 8701593 | Gas supply system, substrate processing apparatus and gas supply method | — | 2014-04-22 |
| 8561572 | Gas supply system, substrate processing apparatus and gas supply method | — | 2013-10-22 |
| 8375893 | Gas supply system, substrate processing apparatus and gas supply method | — | 2013-02-19 |
| 8236380 | Gas supply system, substrate processing apparatus and gas supply method | — | 2012-08-07 |
| 8221638 | Gas supply system, substrate processing apparatus and gas supply method | — | 2012-07-17 |