Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8085052 | Charge eliminating apparatus and method, and program storage medium for removing static electricity from a target object such as a wafer | Eiichi Shinohara | 2011-12-27 |
| 7859279 | Charge eliminating apparatus and method, and program storage medium | Eiichi Shinohara | 2010-12-28 |