Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6564114 | Determining endpoint in etching processes using real-time principal components analysis of optical emission spectra | Anthony J. Toprac, Joseph William Wiseman | 2003-05-13 |
| 6419846 | Determining endpoint in etching processes using principal components analysis of optical emission spectra | Anthony J. Toprac, Joseph William Wiseman | 2002-07-16 |
| 6238937 | Determining endpoint in etching processes using principal components analysis of optical emission spectra with thresholding | Anthony J. Toprac, Joseph William Wiseman | 2001-05-29 |