Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131947 | Method for manufacturing semiconductor device and substrate processing apparatus | Yutaka Motoyama, Satoshi Takagi, Keisuke Fujita | 2024-10-29 |
| 11851752 | Method for forming silicon film and processing apparatus | Yutaka Motoyama, Satoshi Takagi | 2023-12-26 |