Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12269980 | Silicon etching solution and method for producing silicon device using the etching solution | Yoshiki SEIKE, Kenji Kobayashi, Sei NEGORO | 2025-04-08 |
| 11572533 | Quaternary alkylammonium hypochlorite solution, method for manufacturing same, and method for cleaning semiconductor wafer | Takafumi SHIMODA, Yuki KIKKAWA, Takayuki NEGISHI | 2023-02-07 |
| 11466206 | Silicon etching solution and method for producing silicon device using the etching solution | Yoshiki SEIKE, Kenji Kobayashi, Sei NEGORO | 2022-10-11 |
| 11390829 | Treatment liquid for semiconductor wafers, which contains hypochlorite ions | Takafumi SHIMODA, Takayuki NEGISHI, Yuki KIKKAWA | 2022-07-19 |
| 8808976 | Photoresist developer and method for fabricating substrate by using the developer thereof | Shunkichi Omae, Toshiaki Otani, Yasutaka Natsuka | 2014-08-19 |
| 8703402 | Resist pattern forming method and developer | Yuki Chikashige | 2014-04-22 |
| 6949495 | Cleaning solution for removing residue | Mizuki Suto, Ichiro Mikami, Tohru Nonaka | 2005-09-27 |