Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6503688 | Electron beam resist | Jon Andrew Preece, Richard Edward Palmer, Toshihiko Kanayama, Tetsuya Tada | 2003-01-07 |
| 6117617 | Patterning method utilizing electron beam resist containing methanofullerene compound | Toshihiko Kanayama, Tetsuya Tada, Richard Edward Palmer | 2000-09-12 |