Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692986 | Compound film of tungsten and germanium, and semiconductor device | Naoya Okada, Noriyuki Uchida | 2020-06-23 |
| 8367030 | Thin film of metal-silicon compound and process for producing the thin film of the metal-silicon compound | Noriyuki Uchida | 2013-02-05 |
| 8168964 | Semiconductor device using graphene and method of manufacturing the same | Hidefumi Hiura, Fumiyuki Nihei, Tetsuya Tada | 2012-05-01 |
| 8093580 | Semiconductor device and method of manufacturing the same | Hidefumi Hiura, Satoru Toguchi, Tetsuya Tada | 2012-01-10 |
| 7687801 | Dopant material, dopant material manufacturing method, and semiconductor device using the same | Hidefumi Hiura, Tetsuya Tada | 2010-03-30 |
| 7408635 | Optical measurement method and device | Vladimir Pobortchi, Tetsuya Tada | 2008-08-05 |
| 7247548 | Doping method and semiconductor device using the same | Tetsuya Tada, Hidefumi Hiura | 2007-07-24 |
| 7138688 | Doping method and semiconductor device fabricated using the method | Takehide Miyazaki, Hidefumi Hiura | 2006-11-21 |
| 7052653 | Microsize driving device and method for preparation thereof | Yuichi Hiratsuka, Taro Uyeda, Tetsuya Tada | 2006-05-30 |
| 6746537 | Coating apparatus | Tsutomu Fukuda | 2004-06-08 |
| 6680411 | Carborane supercluster and method of producing same | Hidefumi Hiura | 2004-01-20 |
| 6503688 | Electron beam resist | Jon Andrew Preece, Richard Edward Palmer, Alexander Phillip Robinson, Tetsuya Tada | 2003-01-07 |
| 6117617 | Patterning method utilizing electron beam resist containing methanofullerene compound | Tetsuya Tada, Richard Edward Palmer, Alexander Phillip Robinson | 2000-09-12 |
| 5935454 | Ultrafine fabrication method | Tetsuya Tada | 1999-08-10 |
| 5647999 | Method for fine patterning of a polymeric film | Tetsuya Tada | 1997-07-15 |
| 5469323 | Method and apparatus for trapping charged particles | — | 1995-11-21 |
| 5382801 | Method for producing minute particles and apparatus therefor | — | 1995-01-17 |
| 4815850 | Relative-displacement measurement method | Junji Itoh | 1989-03-28 |