Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5332469 | Capacitive surface micromachined differential pressure sensor | — | 1994-07-26 |
| 5316619 | Capacitive surface micromachine absolute pressure sensor and method for processing | — | 1994-05-31 |
| 5285131 | Vacuum-sealed silicon incandescent light | Richard S. Muller | 1994-02-08 |
| 5258097 | Dry-release method for sacrificial layer microstructure fabrication | — | 1993-11-02 |