Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534221 | Method for fabricating continuous space variant attenuating lithography mask for fabrication of devices with three-dimensional structures and microelectronics | Michael Jin, Miles L. Scott | 2003-03-18 |
| 6524755 | Phase-shift masks and methods of fabrication | Michael Jin, James A. Reynolds | 2003-02-25 |
| 6107000 | Method for producing micro-optic elements with gray scale mask | Walter Daschner | 2000-08-22 |
| 5242707 | System and method for producing electro-optic components integrable with silicon-on-sapphire circuits | Sadik C. Esener, Subramania Krishnakumar, Volkan Ozguz, Chi-Yuan Fan | 1993-09-07 |