Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7648802 | Phase shifting test mask patterns for characterizing illumination and mask quality in image forming optical systems | Gregory R. McIntyre | 2010-01-19 |
| 7224458 | Phase-shifting test mask patterns for characterizing illumination polarization balance in image forming optical systems | Gregory R. McIntyre | 2007-05-29 |
| 7030997 | Characterizing aberrations in an imaging lens and applications to visual testing and integrated circuit mask analysis | Kostas Adam, Garth C. Robins, Frank E. Gennari | 2006-04-18 |
| 6686132 | Method and apparatus for enhancing resist sensitivity and resolution by application of an alternating electric field during post-exposure bake | Mosong Cheng | 2004-02-03 |
| 5326659 | Method for making masks | Yong Liu, Avideh Zakhor | 1994-07-05 |