Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5616225 | Use of multiple anodes in a magnetron for improving the uniformity of its plasma | Peter A. Sieck, Richard Newcomb, Stephen C. Schulz | 1997-04-01 |
| 5407551 | Planar magnetron sputtering apparatus | Peter A. Sieck, Milan R. Kirs | 1995-04-18 |