Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5407551 | Planar magnetron sputtering apparatus | Peter A. Sieck, Terry A. Trumbly | 1995-04-18 |
| 5108574 | Cylindrical magnetron shield structure | Abraham I. Belkind, J. Randall Kurie, Zoltan Orban, Jr., Carolynn Boehmler | 1992-04-28 |