Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5798947 | Methods, apparatus and computer program products for self-calibrating two-dimensional metrology stages | Jun Ye, Michael T. Takac | 1998-08-25 |
| 5438204 | Twin-mask, and method and system for using same to pattern microelectronic substrates | Rudolf Von Bünau | 1995-08-01 |
| 4573067 | Method and means for improved heat removal in compact semiconductor integrated circuits | David B. Tuckerman | 1986-02-25 |
| 4567505 | Heat sink and method of attaching heat sink to a semiconductor integrated circuit and the like | David B. Tuckerman, Richard M. Swanson | 1986-01-28 |
| 4450472 | Method and means for improved heat removal in compact semiconductor integrated circuits and similar devices utilizing coolant chambers and microscopic channels | David B. Tuckerman | 1984-05-22 |