Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8610997 | Micro-electromechanical device | — | 2013-12-17 |
| 7692841 | System and method for regulating micromirror position | — | 2010-04-06 |
| 6987601 | Damped control of a micromechanical device | — | 2006-01-17 |
| 6969649 | Method of manufacturing semiconductor integrated circuit devices having a memory device with a reduced bit line stray capacity and such semiconductor integrated circuit devices | Toshihiro Sekiguchi, Yoshitaka Tadaki, Keizo Kawakita, Hideo Aoki, Toshikazu Kumai +6 more | 2005-11-29 |
| 6753219 | Method of manufacturing semiconductor integrated circuit devices having a memory device with a reduced bit line stray capacity and such semiconductor integrated circuit devices | Toshihiro Sekiguchi, Yoshitaka Tadaki, Keizo Kawakita, Hideo Aoki, Toshikazu Kumai +6 more | 2004-06-22 |
| 6618186 | Micro-electromechanical system | — | 2003-09-09 |
| 6528835 | Titanium nitride metal interconnection system and method of forming the same | — | 2003-03-04 |
| 6150214 | Titanium nitride metal interconnection system and method of forming the same | — | 2000-11-21 |
| 6099132 | Manufacture method for micromechanical devices | — | 2000-08-08 |
| 6077735 | Method of manufacturing semiconductor device | Yuji Ezaki, Shinya Nishio, Fumiaki Saitoh, Hideo Nagasawa, Songsu Cho +5 more | 2000-06-20 |
| 6060352 | Method of manufacturing semiconductor device with increased focus margin | Toshihiro Sekiguchi, Hideo Aoki, Yoshitaka Tadaki, Keizo Kawakita, Jun Murata +6 more | 2000-05-09 |
| 6053617 | Manufacture method for micromechanical devices | — | 2000-04-25 |
| 5937290 | Method of manufacturing semiconductor integrated circuit devices using phase shifting mask | Toshihiro Sekiguchi, Yoshitaka Tadaki, Keizo Kawakita, Katsuo Yuhara, Kazuhiko Saito +4 more | 1999-08-10 |
| 5933726 | Method of forming a semiconductor device have a screen stacked cell capacitor | Michio Nishimura, Kazuhiko Saitoh, Masayuki Yasuda, Takashi Hayakawa, Michio Tanaka +14 more | 1999-08-03 |
| 5933724 | Method of manufacturing a semiconductor integrated circuit device using a photomask in which transmitted light beam intensities are controlled | Toshihiro Sekiguchi, Yoshitaka Tadaki, Keizo Kawakita, Jun Murata, Katsuo Yuhara +7 more | 1999-08-03 |
| 5872046 | Method of cleaning wafer after partial saw | Takeshi Harada | 1999-02-16 |
| 5804479 | Method for forming semiconductor integrated circuit device having a capacitor | Hideo Aoki, Jun Murata, Yoshitaka Tadaki, Toshihiro Sekiguchi, Keizo Kawakita +9 more | 1998-09-08 |
| 5804034 | Method for manufacturing semiconductor device | — | 1998-09-08 |
| 5646768 | Support posts for micro-mechanical devices | — | 1997-07-08 |
| 5497262 | Support posts for micro-mechanical devices | — | 1996-03-05 |
| 5485304 | Support posts for micro-mechanical devices | — | 1996-01-16 |
| 4855798 | Semiconductor and process of fabrication thereof | Youichiro Imamura, Hironori Ishimoto | 1989-08-08 |