Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5503707 | Method and apparatus for process endpoint prediction based on actual thickness measurements | Stephanie W. Butler, Steven A. Henck | 1996-04-02 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5503707 | Method and apparatus for process endpoint prediction based on actual thickness measurements | Stephanie W. Butler, Steven A. Henck | 1996-04-02 |